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Multi-scale micro-nano structures prepared by laser cleaning assisted laser ablation for broadband ultralow reflectivity silicon surfaces in ambient air

Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationOptical PropertiesLaser Micro-processingApplied PhysicsLaser AblationLaser Processing TechnologyLaser-assisted DepositionMicro-optical ComponentMulti-scale Micro-nano StructuresLaser Cleaning