Small · 2019 · 11 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanotechnologyThin FilmsMicrofabrication MaterialsMicrofabrication ProcessesNanomaterial CharacterizationNanoscale MaterialsThin Film LithographyThin-film PatterningMicro-metrologyMicroscale FabricationMicrotopographyNanometer-scale MetrologyThree-dimensional Nanostructuring
In article number 1902612, Fengqiang Zhang, Changhai Li, Jia Zhang, and Zhenlong Wang report a microtopographic substrate guided strategy for controlling the distribution of multi-materials with an accuracy of up to ≈18 nm. For generalization, a mathematical model is developed to guide the distribution of position, size, shape, and type of material on an arbitrary section for the given morphology of the substrate.