FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices

A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves

James J. Campbell, William Jones · IEEE Transactions on Sonics and Ultrasonics · 1968 · 703 citations

Natural Sciences, Electrical Engineering, Crystal Structure +15

Nanocrystalline diamond

Oliver A. Williams · Diamond and Related Materials · 2011 · 428 citations

Surface Waves in Piezoelectrics

K.A. Ingebrigtsen · Journal of Applied Physics · 1969 · 280 citations

Natural Sciences, Electrical Engineering, Physics +13

AlN piezoelectric thin films for energy harvesting and acoustic devices

Chunlong Fei, Xiangli Liu, Benpeng Zhu et al. · Nano Energy · 2018 · 251 citations

Natural Sciences, Materials Engineering, Materials Science +16

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 237 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16