Materials Science in Semiconductor Processing · 2019 · 44 citations · 63 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryThermal AnalysisThin FilmsMagnetic OxidesMetal OxidesThin Film AnnealingThin Film Thermal PropertiesThin-film DepositionThin-film MaterialsAnnealing EffectsAnnealing Temperature EffectsAnnealing Time EffectsOxide Growth KineticsThermal AnnealingThin Oxide FilmsThin-film Oxides
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