Journal of Materials Processing Technology · 2019 · 21 citations · 25 references
EngineeringManufacturing EngineeringMaterials ScienceMicrofabricationOpticsSemiconductor DevicesEtching ProcessesLaser PhysicsLaser Surface ProcessingThin Film EtchingDevice FabricationEtch MechanismsEtch Profile ControlEtchingWet Etching
25
Thermal decomposition temperatures of metal sulfates
Hiroaki Tagawa · Thermochimica Acta · 1984 · 135 citations