Publication | Closed Access
Micromachined multigroove silicon ATR FT-IR internal reflection elements for chemical imaging of microfluidic devices
26
Citations
34
References
2019
Year
EngineeringMicroscopyAnalytical MicrosystemsOptoelectronic DevicesBiomedical EngineeringIntegrated CircuitsInternal Reflection ElementsMicromachinesMicrofluidic DevicesMicroscale SystemChemical ImagingMicrofluidicsInfrared TechnologyMicroelectronicsOptical SensorsBiomedical DiagnosticsMicrofabricationInfrared SensorApplied PhysicsInfrared Chemical ImagingLab-on-a-chipInfrared Systems
The performance of low-cost, microgroove silicon (Si)-based internal reflection elements (μ-groove IREs) for infrared chemical imaging of microfluidic devices is described.
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