Concepedia

Evolution of a-Si:H to nc-Si:H transition of hydrogenated silicon films deposited by trichlorosilane using principle component analysis of optical emission spectroscopy

Song-Ho Wang, Hsueh-Er Chang, Chien-Chieh Lee, Yiin‐Kuen Fuh, Tomi T. Li

Materials Chemistry and Physics · 2019 · 18 citations · 50 references

DOI

Concepts

References

50

Statistical process monitoring: basics and beyond

S. Joe Qin · Journal of Chemometrics · 2003 · 1.6K citations

, , +16

Intrinsic microcrystalline silicon: A new material for photovoltaics

O. Vetterl, F. Finger, R. Carius et al. · Solar Energy Materials and Solar Cells · 2000 · 574 citations

, , +14

Infrared Spectrum and Structure of Hydrogenated Amorphous Silicon

H. R. Shanks, C. J. Fang, L. Ley et al. · physica status solidi (b) · 1980 · 509 citations

, , +15

Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

Qin He, Jin Wang · IEEE Transactions on Semiconductor Manufacturing · 2007 · 457 citations

, , +16

Prediction of surface roughness in extrusion-based additive manufacturing with machine learning

Zhixiong Li, Ziyang Zhang, Junchuan Shi et al. · Robotics and Computer-Integrated Manufacturing · 2019 · 429 citations

, , +13