Display Compatible PMUT Array for Mid-Air Haptic Feedback

Abstract

This paper presents a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array targeting mid-air haptic feedback applications. Compared to existing bulk ultrasound transducer technologies, this array implements polymer-based micromachined ultrasound transducers fabricated in a display-compatible, large area technology. It is, thus, a good candidate for direct integration on top of large displays and allows to fabricate dense PMUT arrays for a fine non-contact haptic experience at interesting price point.