Modeling of C<sub>4</sub>F<sub>8</sub> inductively coupled plasmas: effects of high RF power on the plasma electrical properties - Concepedia

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Modeling of C<sub>4</sub>F<sub>8</sub> inductively coupled plasmas: effects of high RF power on the plasma electrical properties

11

Citations

66

References

2019

Year

Guillaume Le Dain, A. Rhallabi, Aurélie Girard, Christophe Cardinaud, Fabrice Roqueta, Mohamed Boufnichel

Plasma Sources Science and Technology

References

	Year	Citations

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