DC substrate bias enables preparation of superior-performance TiN electrode films over a wide process window

Nana Sun, Dayu Zhou, Shuyan Shi, Wenwen Liu, Xiuming Zhao, Feng Liu, Zhongjie Tian, Shuaidong Li, Jingjing Wang, Faizan Ali

Materials Research Bulletin · 2019 · 12 citations · 31 references

Concepts

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