PtSe ₂ grown directly on polymer foil for use as a robust piezoresistive sensor

Abstract

Robust strain gauges are fabricated by growing PtSe2 layers directly on top of flexible polyimide foils. These PtSe2 layers are grown by low-temperature, thermally-assisted conversion of predeposited Pt layers. Under applied flexure the PtSe2 layers show a decrease in electrical resistance signifying a negative gauge factor. The influence of the growth temperature and film thickness on the electromechanical properties of the PtSe2 layers is investigated. The best-performing strain gauges fabricated have a superior gauge factor to that of commercial metal-based strain gauges. Notably, the strain gauges offer good cyclability and are very robust, surviving repeated peel tests and immersion in water.