Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

Fei Zhu, Kangwei Zhu, Yin Hu, Yunhan Ling, Dong Wang, Haiqing Peng, Zheng Xie, Ruilong Yang, Zhengjun Zhang

Surface and Coatings Technology · 2019 · 29 citations · 37 references

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