Preparation of FeAPO-5 Molecular Sieve Thin Films and Application as a Capacitive Type Humidity Sensor

Abstract

Thin films of FeAPO-5 molecular sieves deposited on TiN-coated silicon wafers have been generated using pulsed laser ablation. The FeAPO-5 films were employed as the dielectric phase in a capacitive type chemical sensor. The FeAPO-5-based sensors exhibited significant changes in capacitance upon exposure to moisture. Interestingly, the sensor also responded to moisture from breathing which makes it useful not only as a potential humidity sensor but as a respiration monitoring device.