Concepedia
Microsystem Technologies · 2019 · 26 citations · 23 references
Materials ScienceElectrical EngineeringPiezoelectric Mems ResonatorEngineeringMicrofabricationPiezoelectricityPiezoelectric MaterialMicroelectronicsMicro-electromechanical System
23
Super-high-frequency two-port AlN contour-mode resonators for RF applications
Matteo Rinaldi, C. Zuniga, Chengjie Zuo et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2010 · 241 citations
On using the dynamic snap-through motion of MEMS initially curved microbeams for filtering applications
Hassen M. Ouakad, Mohammad I. Younis · Journal of Sound and Vibration · 2013 · 118 citations
Engineering, Microfabrication, Mechanics +9
1.52-GHz micromechanical extensional wine-glass mode ring resonators
Yuan Xie, Sheng‐Shian Li, Yu-Wei Lin et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2008 · 104 citations
A novel ZnO piezoelectric microcantilever energy scavenger: Fabrication and characterization
Deepak Bhatia, Himanshu Sharma, R. S. Meena et al. · Sensing and Bio-Sensing Research · 2016 · 74 citations · Full text
Microelectromechanical resonators for radio frequency communication applications
Microsystem Technologies · 2011 · 70 citations · Full text
Microelectromechanical Resonators, Electrical Engineering, Engineering +9