Applied Surface Science · 2019 · 28 citations · 52 references
Natural SciencesMaterials SciencePhysicsPlasma PhysicsSurface EngineeringThin FilmsCoating TechnologyCoatingsPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsSurface CoatingsCarbon CoatingsDischarge ProcessesMetallic CoatingsPlasma DepositionPlasma-assisted CoatingPlasma-enhanced DepositionPlasma-induced Surface Damage
52
Reactive magnetron sputtering of thin films: present status and trends
J. Musil, Pavel Baroch, J. Vlček et al. · Thin Solid Films · 2004 · 396 citations