Oblique angle deposition of nanocolumnar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers - Concepedia

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Oblique angle deposition of nanocolumnar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers

38

Citations

52

References

2019

Year

Wuttichai Phae-ngam, Mati Horprathum, Chanunthorn Chananonnawathorn, Tossaporn Lertvanithphol, Benjarong Samransuksamer, Prayoon Songsiriritthigul, Hideki Nakajima, Surasing Chaiyakun

Current Applied Physics

Materials ScienceZr Target PowersOblique Angle DepositionEngineeringNanomaterialsNanotechnologyNanocolumnar Tizrn FilmsSurface ScienceApplied Physics

References

	Year	Citations

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