Oblique angle deposition of nanocolumnar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers

Wuttichai Phae-ngam, Mati Horprathum, Chanunthorn Chananonnawathorn, Tossaporn Lertvanithphol, Benjarong Samransuksamer, Prayoon Songsiriritthigul, Hideki Nakajima, Surasing Chaiyakun

Current Applied Physics · 2019 · 38 citations · 52 references

Concepts

References

52