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Controllable fabrication and mechanism study of textured ultra-thin silicon wafers via one-step Cu-assisted chemical etching

Materials ScienceWafer Scale ProcessingEngineeringFlexible ElectronicsMicrofabricationMechanism StudySurface ScienceApplied PhysicsSemiconductor Device FabricationControllable FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma EtchingNanolithography Method