Concepedia

Development and theoretical analysis of novel center-inlet computer-controlled polishing process for high-efficiency polishing of optical surfaces

Bin Lin, Xiang-Min Jiang, Zhong-Chen Cao, Tian Huang

Robotics and Computer-Integrated Manufacturing · 2019 · 36 citations · 28 references

Concepts

Materials ScienceTheoretical AnalysisAdvanced Laser ProcessingOptical MaterialsHigh-efficiency PolishingEngineeringMicrofabricationMechanical EngineeringOptical SurfacesSurface TreatmentLaser-assisted DepositionSurface PolishingSurface Processing3D Printing

References

28

Contact of nominally flat surfaces

J. A. Greenwood, J. B. P. Williamson · Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1966 · 5.5K citations

Material removal mechanism in chemical mechanical polishing: theory and modeling

Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 623 citations

Engineering, Mechanical Engineering, Abrasive Process +16

The �??Precessions�?? tooling for polishing and figuring flat, spherical and aspheric surfaces

David Walker, D. Brooks, Andrew King et al. · Optics Express · 2003 · 274 citations · Full text

Engineering, Geometry, Mechanical Engineering +20

Optimization of computer controlled polishing

Richard A. Jones · Applied Optics · 1977 · 250 citations

1/80-Wave Rms Departure, Engineering, Industrial Engineering +18

Towards a deeper understanding of plastic deformation in mono-crystalline silicon

Liangchi Zhang, I. Zarudi · International Journal of Mechanical Sciences · 2001 · 204 citations

Materials Science, Engineering, Severe Plastic Deformation +9