IEEE Electron Device Letters · 2019 · 38 citations · 19 references
EngineeringMechanical EngineeringVibration MeasurementAcoustic SensorSensor TechnologyFlexible SensorVibrationsSurface Acoustic WaveMaterials ScienceSaw Strain SensorFlexible Strain SensorAcoustic PropagationUltrasoundAcoustic Wave DevicesOptical SensorsBiomedical SensorsFlexible ElectronicsFlexible SensorsMicrofabricationSensorsBiomedical DiagnosticsSensor DesignMicromachined Ultrasonic Transducer
This letter presents a highly sensitive flexible strain sensor based on surface acoustic wave (SAW) working principle. The SAW strain sensor employs the piezoelectric single crystal PMN-PT thick film, which significantly improves the sensitivity of the strain sensor to 1243.49 Hz/με. Meanwhile, the flexible strain sensor fabricated by the chemical and mechanical polishing process can realize a wide strain measurement range from -1000 to +1000 με. The repeatability of the device is also evaluated under the strain of 0 and 900 με. The testing results demonstrate that this developed sensor is an excellent candidate for small stain measurement.
19
High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators
Jie Zou, Chih‐Ming Lin, Gongbin Tang et al. · IEEE Electron Device Letters · 2017 · 75 citations