International Journal of Precision Engineering and Manufacturing · 2019 · 191 citations · 147 references
EngineeringMaterials EngineeringMaterials ScienceBiomemsMicroelectromechanical SystemsMicrofabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsMicromachiningGlass Microfluidic Device FabricationGlass Microfluidic FabricationMicrochannel DesignMicrochannel FabricationMicrofluidic Channel FabricationMicrofluidic FabricationMicrofluidic Materials
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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations