Optics and Lasers in Engineering · 2019 · 52 citations · 65 references
EngineeringMaterials EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor DevicesLaser Material ProcessingLaser OpticsLaser PhysicsSemiconductor LasersSilicon PhotonicsUltrafast OpticsFemtosecond Laser SourcesLaser AblationLaser Surface AblationMaterial AblationSilicon Optical PropertiesUltrafast Laser Material ProcessingUltrafast Laser Micromachining
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Femtosecond, picosecond and nanosecond laser ablation of solids
Boris N. Chichkov, C. Momma, Stefan Nolte et al. · Applied Physics A · 1996 · 2.9K citations