Publication | Closed Access
Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film
32
Citations
13
References
2019
Year
Materials ScienceAluminium NitrideMaterial AnalysisEngineeringStrain RelaxationSurface ScienceApplied PhysicsSolid MechanicsChemical Vapor DepositionThin Film ProcessingMicrostructure
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