Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array

Pushing the limits of lithography

Takashi Ito, Shinji Okazaki · Nature · 2000 · 862 citations

Engineering, Electron-beam Lithography, Beam Lithography +5

Projection micro-stereolithography using digital micro-mirror dynamic mask

Cheng Sun, Nicholas X. Fang, Dong Wu et al. · Sensors and Actuators A Physical · 2005 · 851 citations

Microfabrication, Projection Micro-stereolithography, Microscopy +4

Interference lithography: a powerful tool for fabricating periodic structures

Cheng Lü, R. H. Lipson · Laser & Photonics Review · 2009 · 284 citations

Optical Materials, Engineering, Electron-beam Lithography +23

E-beam lithography for micro-/nanofabrication

Matteo Altissimo · Biomicrofluidics · 2010 · 231 citations · Full text

Engineering, Electron-beam Lithography, E-beam Lithography +18

Nanopatterning by Laser Interference Lithography: Applications to Optical Devices

Journal of Nanoscience and Nanotechnology · 2014 · 127 citations · Full text