Concepedia

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

John N. Harb, Larry L. Howell, Christian D. Lott, Timothy W. McLain

TechConnect Briefs · 2001 · 14 citations · 3 references

Concepts

References

3

Analysis and design of polysilicon thermal flexure actuator

Qing‐An Huang, Neville Ka Shek Lee · Journal of Micromechanics and Microengineering · 1999 · 331 citations

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Electrothermal responses of lineshape microstructures

Liwei Lin, Mu Chiao · Sensors and Actuators A Physical · 1996 · 184 citations

, , +5

Polycrystalline-silicon microbridge combustible gas sensor

Ronald P. Manginell · PhDT · 1997 · 21 citations

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