Synthesis, dielectric properties and application in a thin film transistor device of amorphous aluminum oxide Al<sub>x</sub>O<sub>y</sub> using a molecular based precursor route

Nico Koslowski, Shawn Sanctis, Rudolf C. Hoffmann, Michael Brüns, Jörg J. Schneider

Journal of Materials Chemistry C · 2019 · 28 citations · 50 references

Concepts

Abstract

Generation of dielectric amorphous aluminum oxide using a novel chimie douce molecular precursor route is reported.

References

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