A 6 $\mu$ W ±50 ppm/°C ±1500 ppm/V 1.5 MHz $RC$ Oscillator Using Self-Regulation

Abstract

A low power RC relaxation oscillator with very low voltage and temperature sensitivities is presented. Supply sensitivity is reduced by using a self-regulation loop that biases the oscillator near its zero-voltage coefficient point. Fabricated in a 65-nm CMOS process, the prototype 1.5-MHz oscillator consumes 6 μW from 1-V supply and achieves better than ±50 ppm〉°C and ±1500 ppm/V temperature and voltage sensitivities, respectively.