MRS Proceedings · 2005 · 19 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsInterface ScienceSemiconductor DevicesMetal-semiconductor ContactsMetalsSurface ModificationThin Film AdhesionThin-film MaterialsWafer BondingAdhesion MechanismsBarrier Layer DepositionBarrier Layer FormationBarrier MaterialsThin-film Interface Engineering
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