Large-scale data analysis of PECVD amorphous silicon interface passivation layer via the optical emission spectra for parameterized PCA

Hung-Jui Huang, Li-Han Kau, Ho-Song Wang, Yu-Lin Hsieh, Chien-Chieh Lee, Yiin‐Kuen Fuh, Tomi T. Li

The International Journal of Advanced Manufacturing Technology · 2018 · 15 citations · 39 references

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