Structure and tribological behavior of (AlCrNbSiTiV)N film deposited using direct current magnetron sputtering and high power impulse magnetron sputtering

Chun‐Hao Chang, Ching‐Been Yang, Chia-Chi Sung, Chun‐Yao Hsu

Thin Solid Films · 2018 · 35 citations · 27 references

Concepts

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