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Advanced and reliable GaAs/AlGaAs ICP-DRIE etching for optoelectronic, microelectronic and microsystem applications

Electrical EngineeringOptical MaterialsEngineeringWafer Scale ProcessingMicrofabricationApplied PhysicsReliable Gaas/algaas Icp-drieSemiconductor Device FabricationMicrosystem ApplicationsElectronic PackagingMicroelectronicsPlasma EtchingOptoelectronicsCompound Semiconductor