IEEE Transactions on Terahertz Science and Technology · 2018 · 15 citations · 21 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsPhotonicsHigh-frequency Semiconductor DevicesIntegrated Circuit DesignOptical WaveguidesSilicon PhotonicsTerahertz PhotonicsWaveguidesAttenuation ConstantDielectric WaveguidesIntegrated Waveguide CircuitsIntegrated WaveguidesSingle-mode WaveguidesTerahertz Integrated PhotonicsTerahertz WaveguidesWaveguide Design
A U-shaped silicon-on-glass (U-SOG) dielectric waveguide, operating at THz frequencies, is proposed here for the first time. The modal analysis results for a single-mode U-SOG waveguide are also presented. The U-SOG waveguide is fabricated using micromachining system that allows for low-cost and high-precision manufacturing. Measurement results show that the U-SOG waveguide achieves an attenuation constant as low as 0.026 dB/λg (on average) over the frequency range of 0.9-1.08 THz. This measured attenuation is among the lowest reported for THz waveguides in the literature. The proposed U-SOG waveguide is a strong candidate for low-loss and low-cost THz high-density integrated systems.
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