Study on the sintering behavior and characterization of the IGZO ceramics by slip casting

Yang Liu, Yongchun Shu, Xueyun Zeng, Benshuang Sun, Liang Peng, Yu Zhang, Chen Qiu, Jianhong Yi, Jilin He

International Journal of Applied Ceramic Technology · 2018 · 19 citations · 26 references

Concepts

Abstract

Abstract High‐purity In 2 O 3 , Ga 2 O 3 and ZnO (In:Ga:Zn = 1:1:1) mixtures were employed to fabricate the IGZO (In‐Ga‐Zn‐O) ceramics by slip casting. The rheological properties and zeta potential of IGZO slurry were analyzed in details. The optimum amount of dispersant used in the IGZO slurry is studied in details. This study investigated the relationship between the phase composition of sintered IGZO ceramics and sintering temperatures. The IGZO ceramics with high density and low resistivity are successfully synthesized in an air atmosphere, and their grain size is distributed uniformly.

References

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