Sol-gel films for integrated circuits

Sol-gel TiO2 films on silicon substrates

Evguenia Orlova, Vladimir Petrovsky · Thin Solid Films · 1992 · 99 citations

Natural Sciences, Materials Engineering, Materials Science +14

Effect of annealing conditions on alkoxy-derived PZT thin films. Microstructural and CV study

M.I. Yanovskaya, O. A. Dorokhova · Integrated ferroelectrics · 1993 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +17

TdI10: Ferroelectric thin films in integrated microelectronic devices

J. F. Scot, Carlos A. Paz de Araújo · Ferroelectrics · 1992 · 45 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Sol-gel silicon dioxide films

Evguenia Orlova, Vladimir Petrovsky · Thin Solid Films · 1992 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +9

Microelectronic applications of ferroelectric films

Vladimir Petrovsky · Integrated ferroelectrics · 1993 · 28 citations

Natural Sciences, Electrical Engineering, Materials Science +17