Analytical Modeling, Simulation, and Fabrication of a MEMS Rectangular Paddle Piezo-Resistive Micro-Cantilever-Based Wind Speed Sensor

Abstract

In this paper, fabrication of a rectangular paddle micro-cantilever-based wind speed sensor along with its analytical model has been presented. The analytical model uses the closed-form solution to the bending stress caused by static deflection. Simulations of the device were done using finite-element analysis. The simulation, analytical, and experimental results have been compared for a better insight into the sensor behavior. Piezo-resistive deflection detection mechanism has been utilized to measure the wind speed. The experimental results show that the fabricated sensor can detect wind speed up to 29 ms <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> and has a sensitivity of 0.071 mV/ms <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> - V.