Nature Electronics · 2018 · 183 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesField-effect TransistorsIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationMetal-oxide-semiconductor Field-effect TransistorsNanoelectronicsCmos Fabrication ProcessesHeterostructure TransistorsSwitch Fabrication Processes