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A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error

PhotonicsHeterodyne InterferometerOrganic PhotonicsEngineeringPhysicsOptical PropertiesOptical TestingApplied PhysicsInterferometryPhotonic MetrologyOptical MetrologyIntegrated OpticsMetrological EvaluationOptical EngineeringOptoelectronicsDiffractive Optic