Development and characterization of thinned PZT bulk technology based actuators devoted to a 6-DOF micropositioning platform

Amine Benouhiba, Djaffar Belharet, Alex Bienaimé, Vincent Chalvet, Micky Rakotondrabe, Cédric Clévy

Microelectronic Engineering · 2018 · 13 citations · 28 references

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