Microstructural control by substrate heating in Pulse-DC sputtering induced thermoelectric Ge2Sb2Te5 thin films - Concepedia

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Microstructural control by substrate heating in Pulse-DC sputtering induced thermoelectric Ge2Sb2Te5 thin films

17

Citations

26

References

2018

Year

Athorn Vora–ud, Manish Kumar, Su B. Jin, Pennapa Muthitamongkol, Mati Horprathum, Somporn Thaowonkaew, Watchara Chao-moo, Chanchana Thanachayanont, Phan Bach Thang, Tosawat Seetawan,

Journal of Alloys and Compounds

Materials ScienceMaterial AnalysisSubstrate HeatingEngineeringMicrofabricationApplied PhysicsThermoelectric MaterialPulse-dc SputteringThin Film Process TechnologyThin FilmsMicrostructural ControlChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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