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Cu-SiO2 hybrid bonding simulation including surface roughness and viscoplastic material modeling: A critical comparison of 2D and 3D modeling approach

Materials ScienceMaterials EngineeringViscoplastic Material ModelingEngineeringSurface RoughnessMechanical EngineeringApplied PhysicsSurface ScienceMaterial SimulationMaterial ModelingSurface EngineeringSurface ProcessingInterface PropertyCritical Comparison