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In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering

Materials ScienceIi-vi SemiconductorElectrical EngineeringOptical MaterialsIn-ga-zn-o Thin FilmsEngineeringOptical PropertiesOxide ElectronicsApplied PhysicsGallium OxideThin FilmsElectrical PropertiesOptoelectronicsThin Film Processing