Applied Surface Science · 2018 · 35 citations · 26 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceEtching ProcessesIntegrated Circuit FabricationMicrofabrication ProcessesMicromachiningMicrostructure ControlThin Film EtchingHigh-aspect-ratio Surface StructuresMicroscale FabricationSiliconSilicon EtchingSilicon Microstructures
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