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Formation mechanism of inverted pyramid from sub-micro to micro scale on c-Si surface by metal assisted chemical etching temperature

Materials EngineeringMaterials ScienceWafer Scale ProcessingInverted PyramidEngineeringMicrofabricationSurface ScienceApplied PhysicsFormation MechanismSemiconductor Device FabricationC-si SurfaceSilicon On InsulatorMicroelectronicsPlasma EtchingNanolithography MethodMicrostructure