Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch

Performance of low-loss RF MEMS capacitive switches

Charles L. Goldsmith, Zhimin Yao, S. Eshelman et al. · IEEE Microwave and Guided Wave Letters · 1998 · 428 citations

Engineering, Electrical Engineering, Materials Science +17

Micromachined low-loss microwave switches

Zhilin Yao, S. Chen, S. Eshelman et al. · Journal of Microelectromechanical Systems · 1999 · 390 citations

Engineering, Electrical Engineering, Materials Science +17

Micromechanical electrostatic K-band switches

Sergio Pacheco, Clark T.‐C. Nguyen, L.P.B. Katehi · 2002 · 108 citations

Engineering, Electrical Engineering, Electromagnetics +16

Electroplated rf MEMS capacitive switches

J.Y. Park, G.H. Kim, K.W. Chung et al. · 2002 · 61 citations

Engineering, Electrical Engineering, Materials Science +17

Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meanders

K. Girija Sravani, K. Srinivasa Rao · Microsystem Technologies · 2017 · 58 citations

Engineering, Electrical Engineering, Physics +14