High-resolution active-matrix 10-um pixel-pitch GaN LED microdisplays for augmented reality applications

Abstract

We report high resolution (873 x 500), active-matrix, GaN-based LED microdisplays with a pixel pitch of 10 μm. They exhibit the highest resolution for the smallest pixel pitch ever reported for GaN microdisplays. High-density GaN μLED arrays were first patterned at 10-μm pitch on sapphire substrates. Arrays were then hybridized on CMOS active-matrix using the microtube technology. Blue and green monochrome prototypes have been realized. Full video, high-resolution images have been obtained. The performance of these GaN-based microdisplays make them suitable for a wide range of applications from augmented reality and head-up displays to pico- and compact projectors.