Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz

Abstract

In this paper we report on progress towards establishing traceability for fully calibrated on-wafer measurements of planar devices built in membrane technology. For the first time, we present a comprehensive uncertainty budget for on-wafer S-parameter measurements, including instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for three typical devices.