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A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy

Materials ScienceTi/al AlloyElectrical EngineeringMaterials EngineeringEngineeringWide-bandgap SemiconductorApplied PhysicsAluminum Gallium NitrideGan Power DeviceCategoryiii-v Semiconductor