Publication | Closed Access
Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions
46
Citations
12
References
2017
Year
Materials ScienceIon ImplantationEngineeringMicrofabricationApplied PhysicsNanoscale Structural DamageNanostructuringSemiconductor Device FabricationIon BeamGa IonsIon EmissionMicrostructure
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