Publication | Closed Access
Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
10
Citations
16
References
2017
Year
Ion ImplantationEngineeringSurface ScienceNumerical SimulationApplied PhysicsNovel ApproachContinuous TrenchIon BeamComputational ElectromagneticsFocused Ion BeamIon EmissionMicroelectronics
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