Deposition of large area uniform diamond films by microwave plasma CVD

Novel microwave plasma reactor for diamond synthesis

M. Füner, C. Wild, P. Koidl · Applied Physics Letters · 1998 · 203 citations

Natural Sciences, Electrical Engineering, Physics +16

Microwave engineering of plasma-assisted CVD reactors for diamond deposition

François Silva, K. Hassouni, X. Bonnin et al. · Journal of Physics Condensed Matter · 2009 · 162 citations

Natural Sciences, Materials Engineering, Materials Science +14

Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition

Jie Ma, Michael N. R. Ashfold, Yu. A. Mankelevich · Journal of Applied Physics · 2009 · 133 citations

Natural Sciences, Chemistry, Materials Science +16

Coupled effect of nitrogen addition and surface temperature on the morphology and the kinetics of thick CVD diamond single crystals

Jocelyn Achard, François Silva, Ovidiu Brinza et al. · Diamond and Related Materials · 2006 · 121 citations

Natural Sciences, Materials Engineering, Materials Science +12

High-rate growth of single crystal diamond in microwave plasma in CH4/H2 and CH4/H2/Ar gas mixtures in presence of intensive soot formation

A. P. Bolshakov, Victor Ralchenko, V. Yu. Yurov et al. · Diamond and Related Materials · 2015 · 101 citations

Natural Sciences, Materials Science, Physics +16