Deposition of large area uniform diamond films by microwave plasma CVD - Concepedia

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Deposition of large area uniform diamond films by microwave plasma CVD

63

Citations

32

References

2017

Year

Jun Weng, F. Liu, Liwei Xiong, J.H. Wang, Qi Sun

Materials EngineeringDiamond-like CarbonElectrical EngineeringEngineeringPlasma CvdApplied PhysicsGas Discharge PlasmaChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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