Highly sensitive and flexible strain sensors based on patterned ITO nanoparticle channels

Abstract

We demonstrate a highly sensitive and flexible bending strain sensor using tin-doped indium oxide (ITO) nanoparticles (NPs) assembled in line patterns on flexible substrates. By utilizing transparent ITO NPs without any surface modifications, we could produce strain sensors with adjustable gauge factors and optical transparency. We were able to control the dimensional and electrical properties of the sensors, such as channel height and resistance, by controlling the NP assembly speed. Furthermore, we were able to generate controlled gauge factor with values ranging from 18 to 157, which are higher than previous cases using metallic Cr NPs and Au NPs. The alignment of the ITO NPs in parallel lines resulted in low crosstalk between the transverse and longitudinal bending directions. Finally, our sensor showed high optical transmittance, up to ∼93% at 500 nm wavelength, which is desirable for flexible electronic applications.