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A study on the edge chipping according to spindle speed and inclination angle of workpiece in laser-assisted milling of silicon nitride

Advanced Laser ProcessingEngineeringMicrofabricationMaterial MachiningTool WearMechanical EngineeringApplied PhysicsLaser-assisted MillingInclination AngleMachine ToolManufacturing EngineeringMicroelectronicsSilicon Nitride